Piezoresistive Cantilever Performance—Part II: Optimization
نویسندگان
چکیده
منابع مشابه
Piezoresistive Cantilever Optimization and Applications
Piezoresistors are commonly used in microsystems for transducing force, displacement, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is complicated by coupling between design parameters as well as fabrication and appli...
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We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or "clamps" the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indenta...
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New piezoresistive silicon cantilevers designed specifically for torque magnetometry on microscopic samples have been microfabricated and tested. These levers have been optimized to detect the torque in two directions corresponding to flexion and torsion. Torque resolution of ;10 N m can be achieved depending on the operating mode. In one version an integrated loop allows an absolute calibratio...
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Atomic Force Microscopy (AFM) techniques are used with oneor two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of pie...
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The mechanical design and optimization of piezoresistive cantilevers for biosensing applications is studied using finite element analysis. The change of relative resistivity of piezoresistive microcantilevers is analyzed in the presence of the chemical reaction at the receptor surface under the condition of oscillating flow. Chemo-mechanical binding forces have been analyzed in order to underst...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2010
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2009.2036582